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Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.108-115, 2003. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.384-391, 1994. Pennington, NJ. Electrochemical Society
Daffron, C. ; Torek, K. ; Ruzyllo, J. ; Kamieniecki, E.
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Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.281-287, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.401-408, 1994. Pennington, NJ. Electrochemical Society
Brubaker, M. ; Staffa, J. ; Roman, P. ; Fakhouri, S. ; Ruzyllo, J.
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Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.408-414, 1997. Pennington, NJ. Electrochemical Society
Wu, C.T. ; Ridley, R. ; Dolny, G. ; Grebs, T. ; Hao, J. ; Suliman, S. ; Venkataraman, B. ; Awadelkarim, O. ; Williams, R. ; Roman, P. ; Ruzyllo, J.
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Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium. pp.127-133, 2001. Pennington, N.J.. Electrochemical Society
Roman, P. ; Kashkoush, I. ; Novak, R.E. ; Kamieniecki, E. ; Ruzyllo, J.
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Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.344-349, 1995. Pennington, NJ. Electrochemical Society
Roman, P. ; Tsai, C.-L. ; Hengstebeck, R. ; Pantano, C. ; Berry, J. ; Kamieniecki, E. ; Ruzyllo, J.
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Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.145-149, 1999. Pennington, NJ. Electrochemical Society
Ridley, R. ; Wu, C.-T. ; Roman, P. ; Dolny, G. ; Grebs, T. ; Stensney, F. ; Ruzyllo, J.
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Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.158-164, 1999. Pennington, NJ. Electrochemical Society