1.

Conference Proceedings
Conference Proceedings
1. DYNAMIC ANNEALING PHENOMENA AND THE ORIGIN OF RTA-INDUCED “HAIRPIN" DISLOCATIONS
Maszara, W. ; Sadana, D. K. ; Rozgonyi, G. A. ; Sands, T. ; Washburn, J. ; Wortman, J. J.
Pub. info.: Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A..  pp.277-286,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 35
2.

Conference Proceedings
Conference Proceedings
2. INFLUENCE OF RAPID THERMAL ANNEALING OF SHALLOW BF2 IMPLATATION INTO PRE-AMORPHIZED SILICON
Maszara, W. ; Carter, C. ; Sadana, D. K. ; Liu, J. ; Ozguz, V. ; Wortman, J. ; Rozgonyi, G. A.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.285-292,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23
3.

Conference Proceedings
Conference Proceedings
3. GERMANIUM IMPLANTATION INTO SILICON: AN ALTERNATE PRE-AMORPHIZATION/RAPID THERMAL ANNEALING PROCEDURE FOR SHALLOW JUNCTION TECHNOLOGY
Sadana, D. K. ; Myers, E. ; Liu, J. ; Finstaad, T. ; Rozgonyi, G. A.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.303-308,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23
4.

Conference Proceedings
Conference Proceedings
4. Semiconductor Materials Defect Diagnostics for Submicrometer Very Large Scale Integration Technology
Rozgonyi, G. A. ; Sadana, D. K.
Pub. info.: Microelectronics processing : inorganic materials characterization.  pp.75-,  1986.  Washington, DC.  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 295