Development of the ASML EUV alpha demo tool
- Author(s):
Romeo, C. ( ST Microelectronics S.r.l. (Italy) ) Cantu, P. ( ST Microelectronics S.r.l. (Italy) ) Henry, D. ( ST Microelectronics (France) ) Takekoshi, H. ( Nikon Corp. (Japan) ) Hirayanagi, N. ( Nikon Corp. (Japan) ) Suzuki, K. ( Nikon Corp. (Japan) ) McCallum, M. ( Nfkon Precision Europe GmbH (United Kingdom) ) Fujita, H. ( Dai Nippon Prinfing Co., Ltd. (Japan) ) Takikawa, T. ( Dai Nippon Prinfing Co., Ltd. (Japan) ) Hoga, M. ( Dai Nippon Prinfing Co., Ltd. (Japan) ) - Publication title:
- Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5751
- Pub. Year:
- 2005
- Page(from):
- 90
- Page(to):
- 101
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819457318 [0819457310]
- Language:
- English
- Call no.:
- P63600/5751-1
- Type:
- Conference Proceedings
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