Blank Cover Image

Comparison of Fluorosilicate Glass Deposition Chemistries with Film Properties

Author(s):
Shapiro, M.
Rao, V.
Ricci, A.
Cohen, S.
Gotts, H.
Wong, J.
1 more
Publication title:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-25
Pub. Year:
1997
Page(from):
1191
Page(to):
1198
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771788 [1566771781]
Language:
English
Call no.:
E23400/97-25
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings CVD and Characterization of Fluorosilicate Glass

Shapiro, M.J., Matsuda, T., Nguyen, S.V., Parks, C., Dziobkowski, C.

Electrochemical Society
7 Conference Proceedings An Innovative Plasticizer for Flexible PVC Food Contact Applications

Isley J. M., Gott S. L.

Society of Plastics Engineers, Inc. (SPE)
2 Conference Proceedings Influence of the Cure Process on the Properties of Hydrogen Silsequioxane Spin-on Glass

Tobben, D., Weigand, P., Shapiro, M. J., Cohen, S. A.

MRS - Materials Research Society
8 Conference Proceedings Effects of Misfit Strain on Properties of ZnO Films Grown by Pulsed Laser Deposition

Park, M.C., Yoon, W.H., Lee, D.H., Myoung, J.M., Bae, S.H., Lee, S.Y., Yun, I.

Materials Research Society
3 Conference Proceedings RAPID THERMAL ANNEALING OF DEPOSITED SiO2 FILMS

Wong, J., Lu, T-M., Cohen, S. S., Mehta, S.

Materials Research Society
9 Conference Proceedings Fabrication of Er Doped Glass Films as Used in Planar Optical Waveguides

Gates, J. V., Bruce, A. J., Shmulovich, J., Wong, Y. H., Nykolak, G., Barros, M. R. X., Ghosh, R.

MRS - Materials Research Society
4 Conference Proceedings Deposition and Characterization of GaN Films on ITO Glass Substrates by PECVD

J.S. Yuan, G.H. Yu, C.M. Yang, M.Y. Wang

Trans Tech Publications
10 Conference Proceedings THE RELATIONSHIP BETWEEN DEPOSITION CONDITIONS, MICROSTRUCTURE AND PROPERTIES OF RE-TM THIN FILMS

Lee, J-W., Cheng, S-C.N., Kryder, M.H., Laughlin, D.E.

Materials Research Society
5 Conference Proceedings Structural and Optical Properties of ZnS:Mn Films Grown by Pulsed Laser Deposition

Yeung, K.M., Lu, S.G., Mak, C.L., Wong, K.H.

Materials Research Society
11 Conference Proceedings Deposition of Potassium Niobate Thin Films by Metalorganic Chemical Vapor Deposition and Their Nonlinear Optical Properties

Nystrom, M. J., Wessels, B. W., Chen, J., Studebaker, D., Marks, T. J., Lin, W. P., Wong, G. K.

MRS - Materials Research Society
6 Conference Proceedings YBACUO FILMS BY PULSED LASER DEPOSITION AND SPUTTERING

Koga T., Xu H. J., Moon M. B., Rao V. K.

Kluwer Academic Publishers
12 Conference Proceedings Preparation of thin film GaAs on glass by pulsed-laser deposition

Ullrich, B., Erlacher, A., Yano, S., Schroeder, R., Gerasimov, T.G., Haugan, H.J.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12