1.

Conference Proceedings
Conference Proceedings
1. High-Efficiency Second-Harmonic Generation of Copper Vapor Laser and its Application in Sub-Micron Photolithography,
Ren,H. ; Liang,P. ; Shen,Q. ; Ye,R. ; Huang,H. ; Lu,D. ; Du,L.
Pub. info.: Optics for science and new technology : 17th Congress of the International Commission for Optics, August 19-23, 1996, Hotel Riviera(Yusong), Taejon Korea.  Part1  pp.81-82,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2778
2.

Conference Proceedings
Conference Proceedings
2. Improvement of beam quality in an injection-controlled copper vapor laser system
Chen,Q. ; Liang,P. ; Lei,J. ; Shen,Q. ; Ren,H.
Pub. info.: Ultrahigh- and High-Speed Photography and Image-based Motion Measurement.  pp.173-181,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3173
3.

Conference Proceedings
Conference Proceedings
3. Submicron DUV lithography using second-harmonic light of copper vapor laser
Huang,H. ; Lu,D. ; Ren,H. ; Liang,P. ; Du,L.
Pub. info.: Optical Microlithography X.  pp.967-971,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051