1.

Conference Proceedings
Conference Proceedings
1. Application of optical scatterometry to microelectronics and flat panel display processing
McNeil, J.R. ; Coulombe, S.A. ; Logofatu, P.C. ; Raymond, Christopher J. ; Naqvi, Sohail H. ; Collins, G.J.
Pub. info.: Scattering and surface roughness II : 21-23 July 1998, San Diego, California.  pp.202-212,  1998.  Bellingham, Wash..  SPIE
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3426
2.

Conference Proceedings
Conference Proceedings
2. Scatterometry for Lithography Process Control and Characterization in IC Manufacturing
Kostoulas, Yiorgos ; Raymond, Christopher J. ; Littau, Mike
Pub. info.: Progress in semiconductor materials for optoelectronic applications : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.  pp.195-202,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 692