Al+ Ion Implanted On-Axis
- Author(s):
- Publication title:
- Silicon Carbide and Related Materials 2014 : Selected peer reviewed papers from the European Conference on Silicon Carbide & Related Materials (ECSCRM 2014), September 21-25, 2014, Grenoble, France
- Title of ser.:
- Materials science forum
- Ser. no.:
- 821-823
- Pub. Year:
- 2015
- Page(from):
- 399
- Page(to):
- 402
- Pages:
- 4
- Pub. info.:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
1950° C Annealing of Al+ Implanted 4H-SiC: Sheet Resistance Dependence on the Annealing Time
Trans Tech Publications |
7
Conference Proceedings
Competition between Oxidation and Recrystallization in Ion Amorphized (0001) 6H-SiC
Trans Tech Publications |
Trans Tech Publications |
8
Conference Proceedings
Comparison between Chemical and Electrical Profiles in Al+ or N+ Implanted and Annealed 6H-SiC
Trans Tech Publications |
3
Conference Proceedings
Structural,Optical and Chemical Characterization of 300℃,MeV Ion Implanted and 1700℃Annealed 6H-SiC
Materials Research Society |
9
Conference Proceedings
Comparison between Chemical and Electrical Profiles in Al+ or N+ Implanted and Annealed 6H-SiC
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |