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From Smart-Cut to Soft-Cut: Mechanisms of Hydrogen Plasma Supported Layer Exfoliation in Silicon

Author(s):
Publication title:
High purity silicon 9
Title of ser.:
ECS transactions
Ser. no.:
3(4)
Pub. Year:
2006
Page(from):
417
Page(to):
428
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566775045 [1566775043]
Language:
English
Call no.:
E23400/3-4
Type:
Conference Proceedings

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