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Conference Proceedings

1. DEFECT STRUCTURES GENERATED BY BURIED AMORPHOUS LAYER REGROWTH IN <10> ARSENIC IMPLANTED SILICON

Jones, K.S. ; Prussin, S.

Pub. info.:	Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.173-178, 1986. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	71

Conference Proceedings

2. ROLE OF IMPLANT ENERGY ON DEFECT STRUCTURES FOR PHOSPHOROUS IMPLATED SILICON

Prussin, S. ; Jones, K.S.

Pub. info.:	Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.191-196, 1986. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	71