1.

Conference Proceedings

Conference Proceedings
Lafontan,X. ; Dufaza,C. ; Robert,M. ; Pressecq,F. ; Perez,G.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France.  pp.381-390,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4408
2.

Conference Proceedings

Conference Proceedings
Lafontan,X. ; Dufaza,C. ; Robert,M. ; Perez,G. ; Pressecq,F.
Pub. info.: Materials and Device Characterization in Micromachining III.  pp.149-157,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4175