1.

Conference Proceedings

Conference Proceedings
Lafontan,X. ; Pressecq,F. ; Perez,G. ; Dufaza,C. ; Karam,J.-M.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.11-21,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
2.

Conference Proceedings

Conference Proceedings
Lafontan,X. ; Dufaza,C. ; Perez,G. ; Pressecq,F.
Pub. info.: Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France.  pp.236-243,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4019
3.

Conference Proceedings

Conference Proceedings
Lafontan,X. ; Dufaza,C. ; Robert,M. ; Pressecq,F. ; Perez,G.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France.  pp.381-390,  2001.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4408
4.

Conference Proceedings

Conference Proceedings
Lafontan,X. ; Dufaza,C. ; Robert,M. ; Perez,G. ; Pressecq,F.
Pub. info.: Materials and Device Characterization in Micromachining III.  pp.149-157,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4175