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Low-coherence interferometric absolute distance gauge for study of MEMS structures

Author(s):
Walecki, W.J. ( Frontier Semiconductor Inc. (USA) )
Lai, K. ( Frontier Semiconductor Inc. (USA) )
Pravdivtsev, A. ( Frontier Semiconductor Inc. (USA) )
Souchkov, V. ( Frontier Semiconductor Inc. (USA) )
Van, P. ( Frontier Semiconductor Inc. (USA) )
Azfar, T. ( Frontier Semiconductor Inc. (USA) )
Wong, T. ( Frontier Semiconductor Inc. (USA) )
Lau, S.H. ( Frontier Semiconductor Inc. (USA) )
Koo, A. ( Frontier Semiconductor Inc. (USA) )
4 more
Publication title:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5716
Pub. Year:
2005
Page(from):
182
Page(to):
188
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456908 [081945690X]
Language:
English
Call no.:
P63600/5716
Type:
Conference Proceedings

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