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Conference Proceedings

1. Top-surface imaging through silylation

Postnikov,S.V. ; Somervell,M.H. ; Henderson,C.L. ; Katz,S. ; Willson,C.G. ; Byers,J.D. ; Qin,A. ; Lin,Q.

Pub. info.:	Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California. Part 2 pp.997-1008, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3333

Conference Proceedings

2. Study of acid transport using IR spectroscopy and SEM

Stewart,M.D. ; Somervell,M.H. ; Tran,H.V. ; Postnikov,S.V. ; Willson,C.G.

Pub. info.:	Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA. Part2 pp.665-674, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3999

Conference Proceedings

3. Mechanistic understanding of line-end shortening

Stewart,M.D. ; Schmid,G.M. ; Postnikov,S.V. ; Willson,C.G.

Pub. info.:	Advances in Resist Technology and Processing XVIII. 4345 pp.10-18, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4345