Borionetti, G. ; Porrini, M. ; Geranzani, P. ; Orizio, R. ; Falster, R.
Pub. info.:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.104-110, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.16-25, 1993. Pennington, NJ. Electrochemical Society