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Thermal Stabilization And Crystallization Of Nanometric Particles Of Si-C-N Produced By RF-Plasma Enhanced Chemical-Vapor-Deposition

Author(s):
Bertran, E.
Farjas, J.
Garcia-Caurel, E.
Polo, M. C.
Roura, P.
Viera, G.
1 more
Publication title:
Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
609
Pub. Year:
2001
Page(from):
A24.5
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558995178 [155899517X]
Language:
English
Call no.:
M23500/609
Type:
Conference Proceedings

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