Search records | 東京工業大学附属図書館文献データベース

Sort order

3 results

Conference Proceedings

1. The Influence of Amorphizing Implants on Boron Diffusion in Silicon

Chao, H. S. ; Griffin, P. B. ; Plummer, J. D.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.347-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

Conference Proceedings

2. Two-Dimensional Dopant Diffusion Study Using Scanning Capacitance Microscopy

Yu, G. M. ; Griffin, P. B. ; Plummer, J. D.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.233-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	568

Conference Proceedings

3. Experimental Study of Self-Diffusion in Silicon Using Isotopically Enriched Structures

Ural, A. ; Griffin, P. B. ; Plummer, J. D.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.97-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	568