THE ROLE OF IMPLANT TEMPERATURE IN THE FORMATION OF THIN BURIED OXIDE LAYERS
- Author(s):
- Publication title:
- Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 74
- Pub. Year:
- 1987
- Page(from):
- 585
- Page(to):
- 590
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837401 [0931837405]
- Language:
- English
- Call no.:
- M23500/74
- Type:
- Conference Proceedings
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