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Determination of sub-micrometer high aspect ratio grating profiles [5878-03]

Author(s):
Gamaes, J. ( Danish Fundamental Metrology (Denmark); )
Hansen, P.-E.
Agersnap, N. ( Luka Optoscope (Denmark); )
Davi, I.
Petersen, J. C.
Kuhie, A. ( Danish Fundamental Metrology (Denmark); )
Holm, J. ( Ibsen Photonics (Denmark); )
Christensen, L. H. ( Teknologisk Institut (Denmark) )
3 more
Publication title:
Advanced characterization techniques for optics, semiconductors, and nanotechnologies II : 2-4 August, 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5878
Pub. Year:
2005
Page(from):
587803
Page(to):
587803
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458834 [081945883X]
Language:
English
Call no.:
P63600/5878
Type:
Conference Proceedings

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