1.

Conference Proceedings
Conference Proceedings
1. THE EFFECT OF DEPOSITION TEMPERATURE ON THE MICROSTRUCTURE OF LPCVD POLYSILICON FILMS
Hangas, J. ; Liu, D. R. ; Oei, D. G. ; McCarthy, S. L. ; Peters, C.
Pub. info.: Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A..  pp.93-98,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 239
2.

Conference Proceedings
Conference Proceedings
2. High performance SOI technology for sub-45nm gate length CMOS manufacturing Invited
Horstmann, M. ; Greenlaw, D. ; Huebler, P. ; Stephan, R. ; Feudel, Th. ; Wei, A. ; Frohberg, K. ; Hoentschel, J. ; Javorka, P. ; Burbach, G. ; Schwan, C. ; Peters, C. ; Lenski, M ; Press, P. ; Kammler, Th. ; Bierstedt, H. ; Otterbach, R. ; Neu, A. ; Wieczorek, K. ; Schaller, M. ; Salz, H. ; Hohage, J. ; Ruelke, H. ; Klais, J. ; Grasshoff, G. ; Ehrichs, E. ; Goad, S. ; Raab, M. ; Kepler, N.
Pub. info.: Silicon-on-insulator technology and devices XII : proceedings of the international symposium.  pp.57-68,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-03