Implantation Activation Annealing of Si-Implanted Gallium Nitride at Temperatures > 1100°C
- Author(s):
Zolper, J. C. Han, J. Biefeld, R. M. Van Deusen, S. B. Wampler, W. R. Pearton, S. J. Williams, J. S Tan, H. H. Karlicek, R. J., Jr. Stall, R. A. - Publication title:
- Gallium nitride and related materials II : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 468
- Pub. Year:
- 1997
- Page(from):
- 401
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993723 [155899372X]
- Language:
- English
- Call no.:
- M23500/468
- Type:
- Conference Proceedings
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