AFM Analysis of ECR Dry-Etched InGaP, AllnP and AlGaP
- Author(s):
Ren, F. Hobson, W. S. Lothian, J. R. Lopata, J. Caballero, J. A. Lee, J. W. Pearton, S. J. Cole, M. W. - Publication title:
- Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 406
- Pub. Year:
- 1996
- Page(from):
- 209
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993099 [1558993096]
- Language:
- English
- Call no.:
- M23500/406
- Type:
- Conference Proceedings
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