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AFM Analysis of ECR Dry-Etched InGaP, AllnP and AlGaP

Author(s):
Ren, F.
Hobson, W. S.
Lothian, J. R.
Lopata, J.
Caballero, J. A.
Lee, J. W.
Pearton, S. J.
Cole, M. W.
3 more
Publication title:
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
406
Pub. Year:
1996
Page(from):
209
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993099 [1558993096]
Language:
English
Call no.:
M23500/406
Type:
Conference Proceedings

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