1.

Conference Proceedings
Conference Proceedings
1. GaN Etching in BCl3/Cl2 Plasmas
Shul, R. J. ; Ashby, C. I. H. ; Willison, C. G. ; Zhang, L. ; Han, J. ; Bridges, M. M. ; Pearton, S. J. ; Lee, J. W. ; Lester, L. F.
Pub. info.: Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.487-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 512
2.

Conference Proceedings
Conference Proceedings
2. Group-III Nitride Etch Selectivity in BCl3/Cl2 ICP Plasmas
Shul, R. J. ; Zhang, L. ; Willison, C. G. ; Han, J. ; Pearton, S. J. ; Hong, J. ; Abernathy, C. R. ; Lester, L. F.
Pub. info.: GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A..  pp.G8.1.1.-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 537