1.

Conference Proceedings
Conference Proceedings
1. PASSIVATION OF n-TYPE SILICON BY HYDROGEN
Bergman, K. ; Stavola, M. ; Pearton, S. J. ; Lopata, J.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.281-284,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
2.

Conference Proceedings
Conference Proceedings
2. AFM Analysis of ECR Dry-Etched InGaP, AllnP and AlGaP
Ren, F. ; Hobson, W. S. ; Lothian, J. R. ; Lopata, J. ; Caballero, J. A. ; Lee, J. W. ; Pearton, S. J. ; Cole, M. W.
Pub. info.: Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A..  pp.209-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 406