1.

Conference Proceedings
Conference Proceedings
1. Incorporation and Optical Activation of Er in Group III-N Materials Grown by Metalorganic Molecular-Beam Epitaxy
MacKenzie, J. D. ; Abernathy, C. R. ; Pearton, S. J. ; Donovan, S. M. ; Hommerich, U. ; Thaik, M. ; Wu, X. ; Ren, F. ; Wilson, R. G. ; Zavada, J. M.
Pub. info.: Gallium nitride and related materials II : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.123-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 468
2.

Conference Proceedings
Conference Proceedings
2. Selective Etching of Wide-Bandgap Nitrides
Shul, R. J. ; Willison, C. G. ; Bridges, M. M. ; Han, J. ; Lee, J. W. ; Pearton, S. J. ; Abernathy, C. R. ; MacKenzie, J. D. ; Donovan, S. M.
Pub. info.: Power semiconductor materials and devices : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A..  pp.155-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 483
3.

Conference Proceedings
Conference Proceedings
3. Substrate Effects on the Growth of InN
Donovan, S. M. ; MacKenzie, J. D. ; Abernathy, C. R. ; Pearton, S. J. ; Holloway, P. H. ; Ren, F. ; Zavada, J. M. ; Chai, B.
Pub. info.: Gallium nitride and related materials II : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.161-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 468
4.

Conference Proceedings
Conference Proceedings
4. Plasma Chemistries for Dry Etching GaN, AlN, InGaN and InAlN
Pearton, S. J. ; Vartuli, C. B. ; Lee, J. W. ; Donovan, S. M. ; MacKenzie, J. D. ; Abernathy, C. R. ; Shul, R. J. ; McLane, G. F. ; Ren, F.
Pub. info.: Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A..  pp.309-,  1996.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 421
5.

Conference Proceedings
Conference Proceedings
5. InN-Based Ohmic Contacts to AlInN
Donovan, S. M. ; Ren, F. ; MacKenzie, J. D. ; Abernathy, C. R. ; Pearton, S. J. ; Jones, K.
Pub. info.: III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.1067-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 449
6.

Conference Proceedings
Conference Proceedings
6. Comparison of Novel Chlorine, Bromine, and Iodine Plasma Chemistries for Anisotropic Trench Etching in GaN, InN, and AIN
Cho, Hyun ; Maeda, T. ; MacKenzie, J. D. ; Donovan, S. M. ; Abernathy, C. R. ; Pearton, S. J. ; Shul, R. J. ; Han, J. ; Ren, F.
Pub. info.: Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.501-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 512
7.

Conference Proceedings
Conference Proceedings
7. Photoelectrochemical Etching of InxGa1-xN
Cho, H. ; Donovan, S. M. ; Abernathy, C. R. ; Pearton, S. J. ; Ren, F. ; Han, J. ; Shul, R. J.
Pub. info.: GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A..  pp.G6.40.1-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 537
8.

Conference Proceedings
Conference Proceedings
8. ICP Dry Etching of III-V Nitrides
Vartuli, C. B. ; Lee, J. W. ; MacKenzie, J. D. ; Donovan, S. M. ; Abernathy, C. R. ; Pearton, S. J. ; Shul, R. J. ; Constantine, C. ; Barratt, C. ; Katz, A. ; Poyakov, A. Y. ; Shin, M. ; Skowronski, M.
Pub. info.: Gallium nitride and related materials II : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.393-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 468
9.

Conference Proceedings
Conference Proceedings
9. Plasma Damage Effects in InAlN Field-Effect Transistors
Ren, F. ; Lothian, J. R. ; Chen, Y. K. ; MacKenzie, J. D. ; Donovan, S. M. ; Abernathy, C. R. ; Vartuli, C. B. ; Lee, J. W. ; Pearton, S. J. ; Wilson, R. G.
Pub. info.: Gallium nitride and related materials II : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.385-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 468
10.

Conference Proceedings
Conference Proceedings
10. Inductively Coupled Plasma Etching of III-Nitrides in Cl2/Xe, Cl2/Ar and Cl2/He
Cho, H. ; Hahn, Y. B. ; Hays, D. C. ; Jung, K. B. ; Donovan, S. M. ; Abernathy, C. R. ; Pearton, S. J. ; Shul, R. J.
Pub. info.: GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A..  pp.G6.56.1-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 537
11.

Conference Proceedings
Conference Proceedings
11. Dry Etch Damage in InN, InGaN and InAlN
Pearton, S. J. ; Lee, J. W. ; MacKenzie, J. D. ; Vartuli, C. B. ; Donovan, S. M. ; Abernathy, C. R. ; Shul, R. J. ; Ren, F. ; Lothian, J. R.
Pub. info.: III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A..  pp.163-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 423
12.

Conference Proceedings
Conference Proceedings
12. Cl2-Based Dry Etching of the AlGalnN System in Inductively-Coupled Plasmas
Cho, Hyun ; Vartuli, C. B. ; Abernathy, C. R. ; Donovan, S. M. ; Pearton, S. J. ; Shul, R. J. ; Han, J.
Pub. info.: Power semiconductor materials and devices : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A..  pp.327-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 483
13.

Conference Proceedings
Conference Proceedings
13. Rapid Thermal Processing of III-Nitrides
Hong, J. ; Lee, J. W. ; Vartuli, C. B. ; MacKenzie, J. D. ; Donovan, S. M. ; Abernathy, C. R. ; Crockett, R. V. ; Pearton, S. J. ; Zolper, J. C. ; Ren. F.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.401-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470