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Plasma Chemistries for Etching of La0.41Ca0.59MnO3 and SmCo CMR Structures

Author(s):
Wang, J. J.
Jung, K. B.
Childress, J. R.
Pearton, S. J.
Sharifi, F.
Dahmen, K. H.
Gillman, E. S.
Cadieu, F. J.
Rani, R.
Qian, X. R.
Chen, Li
6 more
Publication title:
High-density magnetic recording and integrated magneto-optics, materials and devices : symposium held April 12-16, 1998, San Francisco, California, U.S.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
517
Pub. Year:
1998
Page(from):
141
Pub. info.:
Warrendale, Penn: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994232 [1558994238]
Language:
English
Call no.:
M23500/517
Type:
Conference Proceedings

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