1.

Conference Proceedings
Conference Proceedings
1. Chlorine-Based Plasma Etching of GaN
Shul, R. J. ; Briggs, R. D. ; Pearton, S. J. ; Vartuli, C. B. ; Abernathy, C. R. ; Lee, J. W. ; Constantine, C. ; Barratt, C.
Pub. info.: III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.969-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 449
2.

Conference Proceedings
Conference Proceedings
2. Parametric Study of Compound Semiconductor Etching Utilizing Inductively Coupled Plasma Source
Constantine, C. ; Johnson, D. ; Barratt, C. ; Shul, R. J. ; McClellan, G. B. ; Briggs, R. D. ; Rieger, D. J. ; Karlicek, R. F., Jr. ; Lee, J. W. ; Pearton, S. J.
Pub. info.: Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A..  pp.431-,  1996.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 421