1.

Conference Proceedings
Conference Proceedings
1. Gas Phase Chemistry Study During Deposition Of Amorphous And Microcrystalline Silicon Films By HWCVD Using Quadrupole Mass Spectrometry
Patil, Samadhan B. ; Kumbhar, Alka A. ; Dusane, R.O.
Pub. info.: Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A..  pp.171-178,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 715
2.

Conference Proceedings
Conference Proceedings
2. Improvement in Gate Dielectric Quality of Ultra Thin a: SiN:H MNS Capacitors by Hydrogen Etching of the Substrate
Waghmare, Parag C. ; Patil, Samadhan B. ; Dusane, Rajiv O. ; Rao, V. Ramgopal
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.171-176,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716