Patil, Samadhan B. ; Kumbhar, Alka A. ; Dusane, R.O.
Pub. info.:
Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A.. pp.171-178, 2002. Warrendale. Materials Research Society
Waghmare, Parag C. ; Patil, Samadhan B. ; Dusane, Rajiv O. ; Rao, V. Ramgopal
Pub. info.:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.171-176, 2002. Warrendale. Materials Research Society