1.

Conference Proceedings

Conference Proceedings
Lee, S. ; Park, S. ; Ahn, M. ; Doh, J. ; Kim, S. ; Kim, B. ; Choi, S. ; Han, W.
Pub. info.: Photomask Technology 2006.  pp.63490X-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
2.

Conference Proceedings

Conference Proceedings
Lee, S. ; Park, S. ; Kim, B. ; Choi, S. ; Han, W.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XIII.  pp.628308-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6283