1.

Conference Proceedings

Conference Proceedings
Yi, S.W. ; Lee, S.K. ; Cho, M.J. ; Kong, H.J. ; Yang, D.-Y. ; Park, S. ; Lim, T. ; Kim, R.H. ; Leem, K.-S.
Pub. info.: Micromachining and Microfabrication Process Technology X.  pp.118-129,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5715
2.

Conference Proceedings

Conference Proceedings
Yi, S.W. ; Lee, S.K. ; Kong, H.J. ; Yang, D.-Y. ; Park, S. ; Lim, T. ; Kim, R.H. ; Lee, K.-S.
Pub. info.: Micromachining and Microfabrication Process Technology IX.  pp.137-145,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5342
3.

Conference Proceedings

Conference Proceedings
Yi, S. W. ; Lee, S. K. ; Cho, M. J. ; Kong, H. J. ; Yang, D.-Y. ; Park, S. ; Lim, T. ; Kim, R. H. ; Lee, K.-S.
Pub. info.: MEMS/MOEMS Technologies and Applications II.  pp.227-237,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5641