1.

Conference Proceedings
Conference Proceedings
1. ROLE OF OXYGEN PRECIPITATION PROCESSES IN DEFECT FORMATION AND EVOLUTION IN OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL
Park, J.C. ; Lee, J.D. ; Venables, D. ; Krause, S. ; Roitman, P.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.153-158,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings
Conference Proceedings
2. Effect of implantation conditions on defect microstructure in annealed SIMOX
Lee, J.D. ; Park, J.C. ; Krause, S.J. ; Venables, D. ; Roitman, P.
Pub. info.: Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.82-91,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-11
3.

Conference Proceedings
Conference Proceedings
3. Effect of nitrogen ambients during high temperature SIMOX annealing
Roitman, P. ; Mayo, S. ; Simons, D. ; Krause, S.J. ; Venables, D. ; Park, J.C. ; Lee, J.D. ; Lenahan, P. ; Conley, J.
Pub. info.: Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.92-97,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-11