1.

Conference Proceedings
Conference Proceedings
1. Hybrid PPC methodology using multi-step correction and implementation for the sub-100-nm node
Choi, S.-H. ; Park, J.-S. ; Park, C.-H. ; Chung, W.-Y. ; Kim, I.-S. ; Kim, D.-H. ; Kim, Y.-H. ; Yoo, M.-H. ; Kong, J.-T.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.1176-1183,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
2.

Conference Proceedings
Conference Proceedings
2. Hybrid PPC methodology and implementation in the correction of etch proximity
Park, C.-H. ; Rhie, S.-U. ; Chio, S.-H. ; Kim, D.-H. ; Park, J.-S. ; Kim, Y.-H. ; Yoo, M.-H. ; Kong, J.-T.
Pub. info.: Optical Microlithography XV.  Part One  pp.369-376,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691