1.

Technical Paper

Technical Paper
Kim, Y. ; Kim, J. ; Jeon, Y. ; Bang, J. ; Park, C. ; Lee, D.-H.
Pub. info.: AIAA paper.  2002.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2002
2.

Conference Proceedings

Conference Proceedings
Hong, J. ; Woo, C. ; Park, J. ; Cho, B. ; Choi, J.-S. ; Yang, H. ; Park, C. ; Shin, Y.-C. ; Kim, Y. ; Jeong, G. ; Kim, J. ; Kang, K. ; Kang, C. ; Yim, D. ; Song, Y.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.406-414,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038