1.

Conference Proceedings

Conference Proceedings
D. Kandel ; M. Adel ; B. Dinu ; B. Golovanevsky ; P. Izikson ; V. Levinski ; I. Vakshtein ; P. Leray ; M. Vasconi ; B. Salski
Pub. info.: Optical Measurement Systems for Industrial Inspection V.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6616
2.

Conference Proceedings

Conference Proceedings
P. Leray ; S. Cheng ; D. Kandel ; M. Adel ; A. Marchelli
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.69220O-1-69220O-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922