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Design and Properties of a Thin-Film, MEMS-Based Magnetostrictive Magnetometer

Author(s):
Kistenmacher, T. J.
Osiander, R.
Ecelberger, S. A.
Givens, R. B.
Wickenden, D. K.
Murphy, J. C.
1 more
Publication title:
Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
444
Pub. Year:
1997
Page(from):
75
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993488 [1558993487]
Language:
English
Call no.:
M23500/444
Type:
Conference Proceedings

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