Blank Cover Image

Development of simplified process for KrF excimer halftone mask with chrome-shielding method

Author(s):
Kobayashi,S. ( Sharp Corp. )
Oka,N.
Watanabe,K.
Ohmori,K.
Inoue,M.
Iguchi,K.
1 more
Publication title:
19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3873
Pub. Year:
1999
Vol.:
Part1
Page(from):
288
Page(to):
296
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780849434686 [084943468X]
Language:
English
Call no.:
P63600/3873
Type:
Conference Proceedings

Similar Items:

Kobayashi,S., Watanabe,K., Ohmori,K.

SPIE-The International Society for Optical Engineering

7 Conference Proceedings Unified mask data formats for EB writers

Kuriyama, K., Suzuki, T., Hirumi, J., Yoshioka, N., Hojo, Y., Kawase, Y., Hara, S., Hoga, M., Watanabe, S.W., Inoue, M., …

SPIE-The International Society for Optical Engineering

Komada,M., Kurihara,M., Sasaki,S., Makabe,T., Hayashi,N.

SPIE-The International Society for Optical Engineering

Maetoko, K., Tange, K., Fukuma, H., Yoshioka, N., Kawada, S., Ishizuka, M., Sasaki, T., Sauer, C. A.

SPIE - The International Society of Optical Engineering

Tabata,M., Tsuchiya,H., Sanada,Y., Nishizaka,T., Hirazawa,H., Kobayashi,N., Nagai,H., Watanabe,T., Oohashi,K., Inoue,H., …

SPIE - The International Society for Optical Engineering

Collard, C., Anderson, S.A., Anderson, R.B., III, Clevenger, J.O., Halim, M., Brooks, C.B., Buie, M.J., Sahin, T.

SPIE - The International Society of Optical Engineering

Fukuhara,N., Haraguchi,T., Kanayama,K., Matsuo,T., Takeuchi,S., Tomiyama,K., Saga,T., Hattori,Y., Ooshima,T., Otaki,M.

SPIE - The International Society for Optical Engineering

Tomita, H., Watanabe, K., Kawarabayashi, J., Iguchi, T.

SPIE - The International Society of Optical Engineering

Tabuchi,H., Shichijo,Y., Oka,N., Takenaka,N., lguchi,K.

SPIE - The International Society for Optical Engineering

Hamagishi, G., Ando, T., Higashino, M., Yamashita, A., Mashitani, K., Inoue, M., Kishimoto, S., Kobayashi, T.

SPIE-The International Society for Optical Engineering

Ebizuka, N., Oka, K., Yamada, A., Watanabe, M., Shimizu, K., Kodate, K., Kawabata, M., Teranishi, T., Kawabata, K. S., …

SPIE-The International Society for Optical Engineering

Lee, K., Kim, S., Lee, G., Lee, S., Cho J, Kim W, Bok C, Kim H, Moon S, Kim J

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12