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Band Alignment Issues in Metal/Dielectric Stacks: A Combined Photoemission and Inverse Photoemission Study of the HfO2/Pt and HfO2/Hf Systems

Author(s):
Sayan, S.
Bartynski, R.A.
Robertson, J.
Suehle, J.S.
Vogel, E.
Nguyen, N.V.
Ehrstein, J.
Kopanski, J.J.
Suzer, S.
Holl, M.B.
Garfunkel, E.
6 more
Publication title:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-01
Pub. Year:
2004
Page(from):
255
Page(to):
263
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774062 [1566774063]
Language:
English
Call no.:
E23400/200401
Type:
Conference Proceedings

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