Energy spectra and charge states of debris emitted from laser-produced minimum mass tin plasmas [6151-135]

Author(s):

Fujioka, S. ( Osaka Univ. (Japan) )

Nishimura, H. ( Osaka Univ. (Japan) )

Ando, T. ( Osaka Univ. (Japan) )

Ueda, N ( Osaka Univ. (Japan) )

Namba, S. ( Hiroshima Univ.(Japan) )

Aota, T. ( Osaka Univ. (Japan) )

Murakami, M. ( Osaka Univ. (Japan) )

Nishihara,K. ( Osaka Univ. (Japan) )

Kang,Y. G. ( Osaka Univ. (Japan) )

Sunahara, A. ( Institute for Laser Technology (Japan) )

Furukawa,H. ( Institute for Laser Technology (Japan) )

Hashimoto,K. ( Institute for Laser Technology (Japan) )

Yamaura, M. ( Institute for Laser Technology (Japan) )

Yasuda, Y. ( Osaka Univ. (Japan) )

Nagai, K. ( Osaka Univ. (Japan) )

Norimatsu, T. ( Osaka Univ. (Japan) )

Miyanaga, N. ( Osaka Univ. (Japan) )

Izawa, Y. ( Osaka Univ. (Japan) )

Mima, K. ( Osaka Univ. (Japan) )

14 more

Publication title:

Emerging Lithographic Technologies X

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6151

Pub. Year:

2006

Pt.:

2

Page(from):

61513V

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461940 [0819461946]

Language:

English

Call no.:

P63600/6151

Type:

Conference Proceedings