Energy spectra and charge states of debris emitted from laser-produced minimum mass tin plasmas [6151-135]
- Author(s):
Fujioka, S. ( Osaka Univ. (Japan) ) Nishimura, H. ( Osaka Univ. (Japan) ) Ando, T. ( Osaka Univ. (Japan) ) Ueda, N ( Osaka Univ. (Japan) ) Namba, S. ( Hiroshima Univ.(Japan) ) Aota, T. ( Osaka Univ. (Japan) ) Murakami, M. ( Osaka Univ. (Japan) ) Nishihara,K. ( Osaka Univ. (Japan) ) Kang,Y. G. ( Osaka Univ. (Japan) ) Sunahara, A. ( Institute for Laser Technology (Japan) ) Furukawa,H. ( Institute for Laser Technology (Japan) ) Hashimoto,K. ( Institute for Laser Technology (Japan) ) Yamaura, M. ( Institute for Laser Technology (Japan) ) Yasuda, Y. ( Osaka Univ. (Japan) ) Nagai, K. ( Osaka Univ. (Japan) ) Norimatsu, T. ( Osaka Univ. (Japan) ) Miyanaga, N. ( Osaka Univ. (Japan) ) Izawa, Y. ( Osaka Univ. (Japan) ) Mima, K. ( Osaka Univ. (Japan) ) - Publication title:
- Emerging Lithographic Technologies X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6151
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 61513V
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461940 [0819461946]
- Language:
- English
- Call no.:
- P63600/6151
- Type:
- Conference Proceedings
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