1.

Conference Proceedings

Conference Proceedings
Nakamatsu, H. ; Hirata, K. ; Kawai, S.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.397-402,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101
2.

Conference Proceedings

Conference Proceedings
Kitahama, K. ; Hirata, K. ; Nakamatsu, H. ; Kawai, S. ; Fujimori, N. ; Imai, T.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.309-318,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75