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The HMDS coating flaw removal tool

Author(s):
  • M. V. Monticelli ( Lawrence Livermore National Lab., United States )
  • M. C. Nostrand ( Lawrence Livermore National Lab., United States )
  • N. Mehta ( Lawrence Livermore National Lab., United States )
  • L. Kegelmeyer ( Lawrence Livermore National Lab., United States )
  • M. A. Johnson ( Lawrence Livermore National Lab., United States )
Publication title:
Laser-Induced Damage in Optical Materials: 2008
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
7132
Pub. Year:
2008
Page(from):
71320V-1
Page(to):
71320V-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473660 [0819473669]
Language:
English
Call no.:
P63600/7132
Type:
Conference Proceedings

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