Checker-Board Carbonization for Control and Reduction of the Mean Curvature of 3C-SiC Layers Grown on Si(100) Substrates

Checker-Board Carbonization for Control and Reduction of the Mean Curvature of 3C-SiC Layers Grown on Si(100) Substrates

Author(s):

Chassagne, T.

Publication title:

Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003

Title of ser.:

Materials science forum

Ser. no.:

457-460

Pub. Year:

2004

Page(from):

265

Page(to):

268

Pages:

4

Pub. info.:

Uetikon-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499434 [0878499431]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00013363
Series ID:	PA00000012
Conf. info. (Name):	ICSCRM : Intenational Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	2003 : 10th
Conf. info. (Venue):	Lyon, France
Conf. info. (Date):	2003.10.05-2003.10.10

Similar Items:

1 Conference Proceedings How to Grow Unstrained 3C-SiC Heteroepitaxial Layers on Si (100) Substrates Chassagne, T., Ferro, G., Gourbeyre, C., Berre, M.Le, Barbier, D., Monteil, Y. Trans Tech Publications	7 Conference Proceedings Investigation of 2 Inch SiC Layers Grown in a Resistively-Heated LP-CVD Reactor with Horizontal "Hot-Walls" Chassagne, T., Leycuras, A., Balloud, C., Arcade, P., Peyre, H., Juillaguet, S. Trans Tech Publications
2 Conference Proceedings Low Specific Contact Resistance to 3C-SiC Grown on (100) Si Substrates A.E. Bazin, T. Chassagne, J.F. Michaud, A. Leycuras, M. Portail, M. Zielinski, E. Collard, D. Alquier Trans Tech Publications	8 Conference Proceedings Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers Ferro, G., Panknin, D., Stoemenos, J., Balloud, C., Camassel, J., Polychroniadis, E., Monteil, Y., Skorupa, W. Trans Tech Publications
3 Conference Proceedings Control of Stress With Growth Conditions and Mechanical Parameters Determination of 3C-SiC Heteroepitaxial Thin Films Gourbeyre, C., Chassagne, T, Berre, M. Le, Ferro, G., Malhaire, C., Monteil, Y., Bardier, D. Materials Research Society	9 Conference Proceedings Initial Stages of ss-SiC Growth by Chemical Vapor Deposition on an Ultrathin SiC Buffer Layer on Si(100) Ferro, G., Thevenot, V., Vincent, H., Monteil, Y., Bouix, J. Electrochemical Society
4 Conference Proceedings Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI Chassagne, T., Ferro, G., Wang, H., Stoemenos, Y., Peyre, H., Contreras, S., Camassel, J., Monteil, Y., Ghyselen, B. Trans Tech Publications	10 Conference Proceedings SIMS Investigation of Ge Incorporation in 3C-SiC Layers Grown from Ge-Si Melts H. Peyre, N. Habka, V. Souliere, M. Soueidan, G. Ferro, Y. Monteil, J. Camassel Trans Tech Publications
5 Conference Proceedings Improved SiCOI Structures Elaborated by Heteroepitaxy of 3C-SiC on SOI Chassagne, T., Ferro, G., Wang, H., Stoemenos, Y., Peyre, H., Contreras, S., Camassel, J., Monteil, Y., Ghyselen, B. Trans Tech Publications	11 Conference Proceedings Growth Mode and Kinetics of Atmospheric Pressure Chemical Vapour Deposition of β-SiC on Si(100)Substrate Ferro,G., Vincent,H., Monteil,Y., Chaussende,D., Bouix,J. Trans Tech Publications
6 Conference Proceedings Strain in 3C-SiC Heteroepitaxial Layers Grown on (100) and (111) Oriented Silicon Substrates M. Zielinski, M. Portail, T. Chassagne, Y. Cordier Trans Tech Publications	12 Conference Proceedings Optical Investigation of Cubic SiC Layers Grown on Hexagonal SiC Substrates by CVD and VLS N. Habka, V. Souliere, J.M. Bluet, M. Soueidan, G. Ferro, Y. Monteil Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12