SiC Thin Film Characterization and Stress Measurements for High-Temperature Sensors Applications

SiC Thin Film Characterization and Stress Measurements for High-Temperature Sensors Applications

Author(s):

Gourbeyre, C.

Publication title:

Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

546

Pub. Year:

1999

Page(from):

91

Page(to):

96

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558994522 [1558994521]

Language:

English

Call no.:

M23500/546

Type:

Conference Proceedings

Details

TDL ID:	ZA00014184
Series ID:	PA00000011
Conf. info. (Name):	Symposium on materials science of microelectromechanical systems (MEMS) devices
Conf. info. (Number):	1998
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1998.12.01-1998.12.02

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