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Morphology and mechanical properties of oblique angle columnar thin films

Author(s):
Publication title:
Complex mebiums : 30 July-1 August 2000, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4097
Pub. Year:
2000
Page(from):
291
Page(to):
298
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437426 [0819437425]
Language:
English
Call no.:
P63600/4097
Type:
Conference Proceedings

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