Integration of new alignment mark designs in dual inlaid-copper interconnect processes

Integration of new alignment mark designs in dual inlaid-copper interconnect processes

Author(s):

Warrick, S.P. ( Motorola (USA) )

Hinnen, P.C. ( ASML (Netherlands) )

van Haren, R.J.

Smith, C.J. ( Motorola (USA) )

Megens, H.J. ( ASML (Netherlands) )

Fu, C.-C. ( Motorola (USA) )

1 more

Publication title:

Optical Microlithography XV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4691

Pub. Year:

2002

Vol.:

Part Two

Page(from):

971

Page(to):

980

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819444370 [0819444375]

Language:

English

Call no.:

P63600/4691

Type:

Conference Proceedings

Details

TDL ID:	ZA00012526
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Optical microlithography
Conf. info. (Number):	2002 : 15th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	2002.03.05-2002.03.08

Similar Items:

1 Conference Proceedings Overlay performance with advanced ATHENA alignment strategies Huijbregste, J., Haren, R.J.F., Jeunink, A., Hinnen, P.C., Swinnen, B., Navarro, R., Simons, G., Bilsen, F., Tolsma, H., … SPIE-The International Society for Optical Engineering	7 Conference Proceedings Development of a Copper CMP Process for Multilevel, Dual Inlaid Metallization in Semiconductor Devices Selinidis, S.R., Watts, D.K., Saravia, J., Gomez, J., Dang, C., Islam, R., Klein, J., Farkas, J. Electrochemical Society
2 Conference Proceedings Alignment robustness for 90 nm and 65 nm node through copper alignment mark integration optimization Scott Warrick, Paul Hinnen, Rob Morton, Kevin Cooper, Pierre-Olivier Sassoulas, Jerome Depre, Ramon Navarro, Richard van … SPIE - The International Society of Optical Engineering	8 Conference Proceedings Diffusional Void Growth in Dual-Inlaid Cu Interconnects Jawarani, D., Gall, M., Capasso, C., Clark, G., Hernandez, R., Kawasaki, H. Electrochemical Society
3 Conference Proceedings Advances in process overlay: ATHENA alignment system performance on critical process layers Laidler, D., Megens, H.J., Lalbahadoersing, S., van Haren, R.J., Bornebroek, F. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Integration of a new alignment sensor for advanced technology nodes P. Hinnen, J. Depre, S. Tanaka, S. Lim, O. Brioso, M. Shahrjerdy, K. Ishigo, T. Kono, T. Higashiki SPIE - The International Society of Optical Engineering
4 Conference Proceedings Advances in process overlay Hinnen,P.C., Megens,H.J.L., Schaar,M.van der, Haren,R.J.F.van, Mos,E.C., Lalbahadoersing,S., Bornebroek,F., Laidler,D. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Copper metallization for on-chip interconnects Gelatos,A.V., Nguyen,B.-Y., Perry,K.A., Marsh,R., Peschke,J., Filipiak,S., Travis,E.O., Thompson,M.A., Saaranen,T., … SPIE-The International Society for Optical Engineering
5 Conference Proceedings A methodology for the characterization of topography induced immersion bubble defects Warrick, S., Hinnen, P., Morton, R., Cooper, K., Sassoulas, P.-O., Depre, J., Navarro, R., van Haren, R., Browning, C., … SPIE - The International Society of Optical Engineering	11 Conference Proceedings Dependence of EM performance on linewidth for Cu dual-inlaid structures Zhao,L., Capasso,C., Marathe,A., Thrasher,S., Hernandez,R., Mulski,P., Rose,S., Nguyen,T., Gall,M., Kawasaki,H. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Advances in process overlay: alignment solutions for future technology nodes H. Megens, R. van Haren, S. Musa, M. Doytcheva, S. Lalbahadoersing, M. van Kemenade, H. Lee, P. Hinnen, F. van Bilsen SPIE - The International Society of Optical Engineering	12 Conference Proceedings Alignment and overlay metrology issues for copper/low-K dual-damascene interconnect Kafai Lai, Chris Nelson, Mark R. Breen, Theodore G. Doros, Dan W. Holladay SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12