1.

Conference Proceedings

Conference Proceedings
Montelius,L. ; Heidari,B. ; Graczyk,M. ; Ling,T. ; Maximov,I. ; Sarwe,E.-L.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.442-452,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
2.

Conference Proceedings

Conference Proceedings
Emanueisson,P. ; Maximov,I. ; Linke,H. ; Omling,P. ; Samuelson,L. ; Meyer,B.K.
Pub. info.: Proceedings of the 17th International Conference on Defects in Semiconductors : ICDS-17, Gmunden, Austria, July 18-23, 1993.  Pt.3  pp.1541-1546,  1994.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 143-147