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PHOTOCHEMICAL ETCHING EFFECTS ON OPTICAL PROPERTIES OF POROUS SILICON

Author(s):
Kanemitsu, Y.
Uto, H.
Masumoto, Y.
Matsumoto, T.
Futagi, T.
Mimura, H.
1 more
Publication title:
Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
283
Pub. Year:
1993
Page(from):
221
Page(to):
226
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991781 [1558991786]
Language:
English
Call no.:
M23500/283
Type:
Conference Proceedings

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