1.

Conference Proceedings
Conference Proceedings
1. Mechanical distortions in advanced optical reticles
Mikkelson,A.R. ; Engelstad,R.L. ; Lovell,E.G. ; Bloomstein,T.M. ; Mason,M.E.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.744-755,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
2.

Conference Proceedings
Conference Proceedings
2. Influence of film stress on advanced optical reticle distortions
Siewert,L.K. ; Mikkelson,A.R. ; Engelstad,R.L. ; Lovell,E.G. ; Mason,M.E. ; Mackay,R.S.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1594-1604,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000