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Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems

Author(s):
Martin, C. ( Ctr. Nacional de Microelectronica (Spain) )
Davis, Z. ( Danmarks Tekniske Univ. (Denmark) )
Forsen, E. ( Danmarks Tekniske Univ. (Denmark) )
Dong, M. ( Danmarks Tekniske Univ. (Denmark) )
Montserrat, J. ( Ctr. Nacional de Microelectronica (Spain) )
Abadal, G. ( Univ. Autonoma de Barcelona (Spain) )
Perez-Murano, F. ( Ctr. Nacional de Microelectronica (Spain) )
Borrise, X. ( Univ. Autonoma de Barcelona (Spain) )
Boisen, A. ( Ctr. Nacional de Microelectrynica (Spain) )
Barniol, N. ( Univ. Autynoma de Barcelona (Spain) )
5 more
Publication title:
Nanotechnology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5118
Pub. Year:
2003
Page(from):
189
Page(to):
196
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819449788 [0819449784]
Language:
English
Call no.:
P63600/5118
Type:
Conference Proceedings

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