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Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling

Author(s):
Publication title:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-12
Pub. Year:
1997
Page(from):
102
Page(to):
113
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771399 [1566771390]
Language:
English
Call no.:
E23400/97-12
Type:
Conference Proceedings

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